Effects of current wave forms on the copper trench filling during damascene platin

Title
Effects of current wave forms on the copper trench filling during damascene platin
Authors
이유용이재봉조병원박영준
Keywords
electroplating
Issue Date
2002-05
Publisher
대한금속 . 재료학회지; J. Kor. Inst. Met. & Mater.
Citation
VOL 40, NO 5, 550-555
URI
http://pubs.kist.re.kr/handle/201004/15722
Appears in Collections:
KIST Publication > Article
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