Pulse plasma enhanced atomic layer deposition of tungsten nitride thin film

Title
Pulse plasma enhanced atomic layer deposition of tungsten nitride thin film
Authors
김용태
Keywords
pulse plasma; PPALD; WF6; NH3; 1000마이크로오옴; 저저항; Cu확산방지
Issue Date
2002-04
Publisher
2002 대한금속·재료학회 춘계학술대회
Citation
, 47-47
URI
http://pubs.kist.re.kr/handle/201004/15740
Appears in Collections:
KIST Publication > Conference Paper
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