Origin of trace organic contaminants adsorbed on the surface of silicon wafers in a manufacturing line

Title
Origin of trace organic contaminants adsorbed on the surface of silicon wafers in a manufacturing line
Authors
박현미김영만정찬성류재천이대운이강봉
Keywords
silicon wafers; anion analysis; ion chromatography; environmental analysis
Issue Date
2002-04
Publisher
Analytical Sciences
Citation
VOL 18, 477-479
URI
http://pubs.kist.re.kr/handle/201004/15748
ISSN
0910-6340
Appears in Collections:
KIST Publication > Article
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