Fabrication of high-aspect-ratio in-plane actuator using UV-LIGA process

Title
Fabrication of high-aspect-ratio in-plane actuator using UV-LIGA process
Authors
김종용채경수정대석김태엽문성욱이종철
Keywords
MEMS; UV-LIGA; nickel; optical switch
Issue Date
2002-04
Publisher
제4회 한국 MEMS 학술대회 초록집; The 4th Korean MEMS Conference
Citation
, 58-62
URI
http://pubs.kist.re.kr/handle/201004/15755
Appears in Collections:
KIST Publication > Conference Paper
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