Effects of annealing on the microstructures and mechanical properties of TiN/AlN nano-multilayer films prepared by ion-beam assisted deposition

Title
Effects of annealing on the microstructures and mechanical properties of TiN/AlN nano-multilayer films prepared by ion-beam assisted deposition
Authors
김도근성태연백영준
Keywords
TiN/AlN multilayers
Issue Date
2002-04
Publisher
Surface and Coatings Technology
Citation
VOL 153, 79-83
URI
http://pubs.kist.re.kr/handle/201004/15806
ISSN
0257-8972
Appears in Collections:
KIST Publication > Article
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