Formation and characterization of self-patterned PZT film for applying to micro-mechanical detecting system

Title
Formation and characterization of self-patterned PZT film for applying to micro-mechanical detecting system
Authors
하수민김우식박형호김태송
Keywords
PZT
Issue Date
2002-03
Publisher
Ferroelectrics
Citation
VOL 273, 351-357
URI
http://pubs.kist.re.kr/handle/201004/15875
ISSN
0015-0193
Appears in Collections:
KIST Publication > Article
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