Multilayer diffusional growth in silicon-molybdenum interactions

Title
Multilayer diffusional growth in silicon-molybdenum interactions
Authors
윤진국변지영김긍호김재수최종술
Keywords
multilayer; chemical vapor deposition (CVD); diffusion; molybdenum silicides
Issue Date
2002-02
Publisher
Thin Solid Films
Citation
VOL 405, 170-178
URI
http://pubs.kist.re.kr/handle/201004/15881
ISSN
0040-6090
Appears in Collections:
KIST Publication > Article
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