HARS (High Aspect Ratio Structure) fabrication for 3D MEMS antenna array using novel photolithography apparatus

Title
HARS (High Aspect Ratio Structure) fabrication for 3D MEMS antenna array using novel photolithography apparatus
Authors
박종연김근태김진석한용희문성욱박정호
Keywords
3D MEMS antenna
Issue Date
2002-02
Publisher
The 9th Korean Conference on Semiconductors
URI
http://pubs.kist.re.kr/handle/201004/15892
Appears in Collections:
KIST Publication > Conference Paper
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