Nanotribological characteristics of silicon surfaces modified by IBAD

Title
Nanotribological characteristics of silicon surfaces modified by IBAD
Authors
윤의성박지현양승호공호성장경영
Keywords
nano-adhesion
Issue Date
2002-02
Publisher
한국윤활학회지; Journal of the KSTLE
Citation
VOL 18, NO 1, 1-8
URI
http://pubs.kist.re.kr/handle/201004/15895
Appears in Collections:
KIST Publication > Article
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