Monolithic film bulk acoustic wave resonator using SOI wafer

Title
Monolithic film bulk acoustic wave resonator using SOI wafer
Authors
김인태박윤권이시형이윤희이전국김남수주병권
Keywords
FBAR; piezoelectric; SOI; MMIC; membrane
Issue Date
2002-12
Publisher
전기전자재료학회논문지; Journal of the Korean Institute of Electrical and Electronic Material Eng
Citation
VOL 15, NO 12, 1039-1044
URI
http://pubs.kist.re.kr/handle/201004/15949
Appears in Collections:
KIST Publication > Article
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