Substrate temperature effect on the formation of PtRhOx thin films

Title
Substrate temperature effect on the formation of PtRhOx thin films
Authors
이광배이경행주병권황충남
Keywords
Electrode barreir; ferroelectric film; Substrate temperature; PtRhOx
Issue Date
2002-11
Publisher
Journal of the Korean Physical Society
Citation
VOL 141, NO 5, 745-748
URI
http://pubs.kist.re.kr/handle/201004/15986
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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