Effect of low pressure annealing for low temperature crystallization of SrBi//2Ta//2O//9 ferroelectric thin films

Title
Effect of low pressure annealing for low temperature crystallization of SrBi//2Ta//2O//9 ferroelectric thin films
Authors
최훈상이관임근식김용태김성일
Issue Date
2002-11
Publisher
AVS 49th International Symposium, Colorado Convention Center Denver
URI
http://pubs.kist.re.kr/handle/201004/16000
Appears in Collections:
KIST Publication > Conference Paper
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