SiC epi-layer growth using single precursor

Title
SiC epi-layer growth using single precursor
Authors
노대호변동진김재수윤진국진정근이종권
Keywords
단일전구체
Issue Date
2002-11
Publisher
2002 년도 한국재료학회 추계학술발표강연 및 논문개요집
Citation
, 100-100
URI
http://pubs.kist.re.kr/handle/201004/16021
Appears in Collections:
KIST Publication > Conference Paper
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