Application of MEMS technology to actuators

Title
Application of MEMS technology to actuators
Authors
문성욱김종용신현준
Keywords
MEMS; actuator
Issue Date
2002-10
Publisher
대한설비공학회
Citation
, 159-166
URI
http://pubs.kist.re.kr/handle/201004/16074
Appears in Collections:
KIST Publication > Conference Paper
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