Characteristics of Cu/C films on polymer substrate by ECR chemical vapor deposition

Title
Characteristics of Cu/C films on polymer substrate by ECR chemical vapor deposition
Authors
이중기전법주조병원박달근고형덕변동진
Keywords
ECR-MOCVD
Issue Date
2002-10
Publisher
9th APCChE Congress and CHEMECA 2002
Citation
, #500.-#500.
URI
http://pubs.kist.re.kr/handle/201004/16087
Appears in Collections:
KIST Publication > Conference Paper
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