Development of ceria-based slurry with high selectivity for STI CMP

Title
Development of ceria-based slurry with high selectivity for STI CMP
Authors
임건자김태은김주선이종호이해원
Keywords
nano-crystalline CeO ₂
Issue Date
2002-10
Publisher
Asia International Conference on Tribology 2002
URI
http://pubs.kist.re.kr/handle/201004/16093
Appears in Collections:
KIST Publication > Conference Paper
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