Fabrication of a high-aspect-ratio structure (HARS) and a 3D feed-horn-shaped structure array for a 3D MEMS antenna array by using a novel UV lithography apparatus

Title
Fabrication of a high-aspect-ratio structure (HARS) and a 3D feed-horn-shaped structure array for a 3D MEMS antenna array by using a novel UV lithography apparatus
Authors
박종연김근태신현준문성욱박정호
Keywords
3D MEMS; uv-lithography; high aspect ratio structure; HARS
Issue Date
2002-10
Publisher
Journal of the Korean Physical Society
Citation
VOL 41, NO 4, 552-556
URI
http://pubs.kist.re.kr/handle/201004/16105
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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