Characteristics of plasma enhanced chemical vapor deposited W-B-N thin films

Title
Characteristics of plasma enhanced chemical vapor deposited W-B-N thin films
Authors
김동준심현상김성일김용태전형탁
Keywords
플라즈마화학증착
Issue Date
2002-01
Publisher
Journal of Vacuum Science and Technology A
Citation
VOL 20, NO 1, 194-197
URI
http://pubs.kist.re.kr/handle/201004/16159
ISSN
0734-2101
Appears in Collections:
KIST Publication > Article
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