Radio-frequency magnetron sputtering power effect on the ionic conductivities of lipon films

Title
Radio-frequency magnetron sputtering power effect on the ionic conductivities of lipon films
Authors
최창훈조원일조병원김형선윤영수탁용석
Keywords
thin film
Issue Date
2002-01
Publisher
Electrochemical and Solid-State Letters
Citation
VOL 5, NO 1, A14-A17
URI
http://pubs.kist.re.kr/handle/201004/16175
ISSN
0013-4651
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE