Analysis of residual stress effect on out-of-plane deformation of chemical-vapor-deposited free-standing diamong films

Title
Analysis of residual stress effect on out-of-plane deformation of chemical-vapor-deposited free-standing diamong films
Authors
정증현백영준김희중권동길
Issue Date
2002-01
Publisher
대한금속 . 재료학회지; Journal of the Korean Institute of Metals and Materials
Citation
VOL 40, NO 1, 26-32
URI
http://pubs.kist.re.kr/handle/201004/16196
ISSN
1738-8228
Appears in Collections:
KIST Publication > Article
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