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dc.contributor.author정증현-
dc.contributor.author백영준-
dc.contributor.author김희중-
dc.contributor.author권동길-
dc.date.accessioned2015-12-02T05:21:01Z-
dc.date.available2015-12-02T05:21:01Z-
dc.date.issued200201-
dc.identifier.citationVOL 40, NO 1, 26-32-
dc.identifier.issn1738-8228-
dc.identifier.other15243-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/16196-
dc.publisher대한금속 . 재료학회지-
dc.publisherJournal of the Korean Institute of Metals and Materials-
dc.titleAnalysis of residual stress effect on out-of-plane deformation of chemical-vapor-deposited free-standing diamong films-
dc.typeArticle-
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