MEMS 기술의 개요 및 전망

Title
MEMS 기술의 개요 및 전망
Authors
주병권
Keywords
MEMS
Issue Date
2001-08
Publisher
전자부품
Citation
, 138-145
URI
http://pubs.kist.re.kr/handle/201004/16270
ISSN
1227917X
Appears in Collections:
KIST Publication > ETC
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