Fabrication of MEMS devices using SOI(silicon-on-insulator)-micromachining technology

Title
Fabrication of MEMS devices using SOI(silicon-on-insulator)-micromachining technology
Authors
주병권하주환서상원최승우최우범
Keywords
SOI
Issue Date
2001-07
Publisher
전기전자재료학회 하계학술대회
Citation
, 874-877
URI
http://pubs.kist.re.kr/handle/201004/16288
Appears in Collections:
KIST Publication > Conference Paper
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