Preparation of AIN thin film with new type of single precursor

Title
Preparation of AIN thin film with new type of single precursor
Authors
안창규최승철한성환
Keywords
MOCVD
Issue Date
2001-08
Publisher
한국세라믹학회지; Journal of the Korean Ceramic Society
Citation
VOL 38, NO 8, 761-764.
URI
http://pubs.kist.re.kr/handle/201004/16294
ISSN
1229-7801
Appears in Collections:
KIST Publication > Article
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