Nano mold lithography for 40nm patterns

Title
Nano mold lithography for 40nm patterns
Authors
박창민최범호현찬경황성우안도열김은규
Keywords
nano mold lithography
Issue Date
2001-07
Publisher
Journal of the Korean Physical Society
Citation
VOL 39, NO 1, 157-159
URI
http://pubs.kist.re.kr/handle/201004/16307
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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