Effects of rapid thermal annealing on the electrical properties of cobalt contact to p-GaN

Title
Effects of rapid thermal annealing on the electrical properties of cobalt contact to p-GaN
Authors
김제원김성일김용태김상식성만영최인훈
Keywords
rapid thermal annealing; cobalt; p-GaN; contact; O2/N2; atmophere; resistance
Issue Date
2001-07
Publisher
Japanese Journal of Applied Physics, Part 1- Regular Papers
Citation
VOL 40, NO 7, 4450-4453
URI
http://pubs.kist.re.kr/handle/201004/16311
ISSN
0021-4922
Appears in Collections:
KIST Publication > Article
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