Effects of applied bias conditions on electrochemical etch-stop characteristics

Title
Effects of applied bias conditions on electrochemical etch-stop characteristics
Authors
정귀상강경두김태송이원재송재성
Keywords
SOI
Issue Date
2001-07
Publisher
TEEM (한국전기전자재료학회)
Citation
VOL 14, NO 4, 263-268
URI
http://pubs.kist.re.kr/handle/201004/16327
ISSN
1229-7607
Appears in Collections:
KIST Publication > Article
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