Deposition of aluminum nitride thin film by MOCVD using AlCl₃ : BuNH₂ single source precursor

Title
Deposition of aluminum nitride thin film by MOCVD using AlCl₃ : BuNH₂ single source precursor
Authors
한성환안창규최승철
Keywords
AIN; MOCVD; single precursor; c-axis oriented
Issue Date
2001-07
Publisher
Proceedings of 14th International Symposium on the Photo Chemistry and Photophysics of Coordination
Citation
, ?
URI
http://pubs.kist.re.kr/handle/201004/16341
Appears in Collections:
KIST Publication > Conference Paper
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