Fabrication, test and simulation of a parylene diaphragm

Title
Fabrication, test and simulation of a parylene diaphragm
Authors
심원철김대호김기훈권기영김병규최범규양상식박종오
Keywords
parylene
Issue Date
2001-06
Publisher
TRANSDUCERS'01 EUROSENSORS XV The 11th International Conference on Soild-State Sensors and Actuator
Citation
, 1382-1385.
URI
http://pubs.kist.re.kr/handle/201004/16434
Appears in Collections:
KIST Publication > Conference Paper
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