Ion beam enhanced formation and luminescence of Si Nanoclusters from α -Sio// χ

Title
Ion beam enhanced formation and luminescence of Si Nanoclusters from α -Sio// χ
Authors
Yohan SunSe-Young SeoJung Hoon ShinTae Gon KimCheong Nam Whang송종한
Keywords
PE-CVD
Issue Date
2001-06
Publisher
Mat. Res. Soc. Symp. Proc.
Citation
VOL 647
URI
http://pubs.kist.re.kr/handle/201004/16436
Appears in Collections:
KIST Publication > Conference Paper
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