Micromachining and fabrication of thin films for MEMS-infrared detectors

Title
Micromachining and fabrication of thin films for MEMS-infrared detectors
Authors
염상섭박흥우박윤권주병권오영제이종훈정문교서상희황근창
Keywords
uncooled IR sensor; MEMS; Multilayered thin film
Issue Date
2001-04
Publisher
Korean Journal of Ceramics
Citation
VOL 7, NO 1, 36-40
URI
http://pubs.kist.re.kr/handle/201004/16520
ISSN
1225-9381
Appears in Collections:
KIST Publication > Article
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