Abnormal growth and electrode characteristics of LiCoO₂ thin films deposited by radio frequency magnetron sputtering

Title
Abnormal growth and electrode characteristics of LiCoO₂ thin films deposited by radio frequency magnetron sputtering
Authors
박호영임영창남상철윤영수조원일조병원윤경석이성래
Keywords
RF magnetron sputtering; LiCoO₂ thin film; thin rilm battery
Issue Date
2001-04
Publisher
한국전기화학회 학술발표회 초록집
Citation
, 78-78
URI
http://pubs.kist.re.kr/handle/201004/16533
Appears in Collections:
KIST Publication > Conference Paper
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