A method for the removal of the colloidal silica from CMP wastewater

Title
A method for the removal of the colloidal silica from CMP wastewater
Authors
정소연김우식조영상
Keywords
콜로이드 실리카; CMP폐수; 폐수처리
Issue Date
2001-04
Publisher
청정기술 2001 춘계학회 Proceedings
Citation
, 73-77
URI
http://pubs.kist.re.kr/handle/201004/16542
Appears in Collections:
KIST Publication > Conference Paper
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