An experimental study on the micro-adhesion of octadecyltrichlorosilane SAM on si surface

Title
An experimental study on the micro-adhesion of octadecyltrichlorosilane SAM on si surface
Authors
윤의성박지현양승호한흥구공호성
Keywords
micro/nano tribology; adhesion; octadecyltrichlorosilane; SAM; self-assembled monolayer
Issue Date
2001-04
Publisher
1st Intelligent Microsystem Symposium IMS 2001
Citation
, 158-162.
URI
http://pubs.kist.re.kr/handle/201004/16546
Appears in Collections:
KIST Publication > Conference Paper
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