스퍼터링 증착 조건에 따른 Cr 박막의 건식식각 특성 평가 및 응용

Title
스퍼터링 증착 조건에 따른 Cr 박막의 건식식각 특성 평가 및 응용
Authors
김훈박종원이주원이윤희장진주병권
Keywords
sputtering
Issue Date
2001-04
Publisher
물리학회 춘계학술발표회
Citation
, 206-206
URI
http://pubs.kist.re.kr/handle/201004/16606
Appears in Collections:
KIST Publication > Conference Paper
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