Material properties of indium oxide films prepared by oxygen ion assisted deposition

Title
Material properties of indium oxide films prepared by oxygen ion assisted deposition
Authors
조준식윤기현고석근
Keywords
ion assisted deposition
Issue Date
2001-03
Publisher
Journal of applied physics
Citation
VOL 89, NO 6, 3223-3228
URI
http://pubs.kist.re.kr/handle/201004/16611
ISSN
0021-8979
Appears in Collections:
KIST Publication > Article
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