A study on the CMP wastewater recycle

Title
A study on the CMP wastewater recycle
Authors
조영상정소연김주희Young Ill Kim조철형김우식
Keywords
CMP; wastewater; silica
Issue Date
2001-03
Publisher
한·미 반도체 환경안전심포지움; Korea-US Technology Exchange Symposium in Environmental, Safe
URI
http://pubs.kist.re.kr/handle/201004/16645
Appears in Collections:
KIST Publication > Conference Paper
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