Lifetime control by low energy electron irradiation and hydrogen annealing

Title
Lifetime control by low energy electron irradiation and hydrogen annealing
Authors
이승호김효진Seong Il Kim조중열Y. Nishihara박용주
Keywords
hydrogenation; defect
Issue Date
2001-02
Publisher
the 8th Kor. Conf. on Semicon.
Citation
, 543-544
URI
http://pubs.kist.re.kr/handle/201004/16659
Appears in Collections:
KIST Publication > Conference Paper
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