Effect of residual stress on the raman-spectrum analysis of tetrahedral amorphous carbon films

Title
Effect of residual stress on the raman-spectrum analysis of tetrahedral amorphous carbon films
Authors
신진국이철승이광렬은광용
Keywords
Ta-C
Issue Date
2001-02
Publisher
Applied physics letters
Citation
VOL 78, NO 5, 631-633
URI
http://pubs.kist.re.kr/handle/201004/16668
ISSN
0003-6951
Appears in Collections:
KIST Publication > Article
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