The measurement of nitrogen ion species ratio in the inductively coupled plasma source ion implantation

Title
The measurement of nitrogen ion species ratio in the inductively coupled plasma source ion implantation
Authors
조정희한승희이연희김옥경김곤호김영우임현의서무진
Keywords
plasma source ion implantation; Ion species; Ion ratio; Nitrogen plasma; QMA; Langmuir probe
Issue Date
2001-02
Publisher
Surface & coatings technology
Citation
VOL 136, NO 1-3, 106-110
URI
http://pubs.kist.re.kr/handle/201004/16674
ISSN
0257-8972
Appears in Collections:
KIST Publication > Article
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