Structural characteristics of Y₂O₃ films grown on oxidized Si(111) surface

Title
Structural characteristics of Y₂O₃ films grown on oxidized Si(111) surface
Authors
Man Ho ChoDae Hong KoYoon Ki ChoiIn Whan LyoKwangho JeongTae Gon Kim송종한Cheong Nam Whang
Keywords
Y₂O₃ RBS
Issue Date
2001-02
Publisher
Journal of applied physics
Citation
VOL 89, NO 3, 1647-1652
URI
http://pubs.kist.re.kr/handle/201004/16677
ISSN
0021-8979
Appears in Collections:
KIST Publication > Article
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