Estimation of the methane conversion in a capacitively coupled radio-frequency plasma

Title
Estimation of the methane conversion in a capacitively coupled radio-frequency plasma
Authors
이화웅Sergey Y. Savinov송형근나병기
Keywords
reaction engineering
Issue Date
2001-12
Publisher
Journal of chemical engineering of Japan
Citation
VOL 34, no. 11, 1356-1365
URI
http://pubs.kist.re.kr/handle/201004/16735
ISSN
0021-9592
Appears in Collections:
KIST Publication > Article
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