EL-MoM2 effects of Ta2O5 and Al2O3 buffer insulators on electrical characteristics of Pt/SrBi2Ta2O9/Si gate structure

Title
EL-MoM2 effects of Ta2O5 and Al2O3 buffer insulators on electrical characteristics of Pt/SrBi2Ta2O9/Si gate structure
Authors
최훈상김용태M. Ischida최인훈이창우
Keywords
NDRO-FRAM; SrBi2Ta2O9; buffer layer; Al2O3
Issue Date
2001-11
Publisher
2001 AVS 48th International Symposium, October 28-November 2, 2001 Moscone Center and Marriott Hotel
Citation
, 7-7
URI
http://pubs.kist.re.kr/handle/201004/16781
Appears in Collections:
KIST Publication > Conference Paper
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