Vacuum in-line packaging and characterization of the surface-micromachined vacuum magnetic field sensors

Title
Vacuum in-line packaging and characterization of the surface-micromachined vacuum magnetic field sensors
Authors
Heung-Woo ParkYun-Kwon ParkDuck-Jung LeeChul-Ju KimJung-Ho Park오명환주병권
Keywords
packaging
Issue Date
2001-10
Publisher
Proceedings of the International Sensor Conference 2001
Citation
, 29-30.
URI
http://pubs.kist.re.kr/handle/201004/16818
Appears in Collections:
KIST Publication > Conference Paper
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