Negative PMER as a novel mold material for UV-LIGA process

Title
Negative PMER as a novel mold material for UV-LIGA process
Authors
권영아채경수김종용정대석박종오오명환문성욱
Keywords
PMER; UV-LIGA; negative photoresist
Issue Date
2001-10
Publisher
Proceedings of the International Sensor Conference 2001
Citation
, 217-218
URI
http://pubs.kist.re.kr/handle/201004/16851
Appears in Collections:
KIST Publication > Conference Paper
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