Oxidation behavior of TiN/AlN multilayer films prepared by ion beam-assisted deposition

Title
Oxidation behavior of TiN/AlN multilayer films prepared by ion beam-assisted deposition
Authors
김도근성태연백영준
Keywords
TiN/AlN multilayers; Superlattices; Oxidation; Auger electron spectroscopy (AES); X-Ray diffraction
Issue Date
2001-10
Publisher
Thin solid films
Citation
VOL 397, NO 1-2, 203-207
URI
http://pubs.kist.re.kr/handle/201004/16854
ISSN
0040-6090
Appears in Collections:
KIST Publication > Article
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