Tin-doped indium oxide (ITO) film deposition by ion beam sputtering

Title
Tin-doped indium oxide (ITO) film deposition by ion beam sputtering
Authors
Younggun HanDonghwan Kim조준식고석근Yo Seung Song
Keywords
ITO; Ion beam sputtering; Low substrate temperature
Issue Date
2001-01
Publisher
Solar energy materials and solar cells : an international journal devoted to photovoltaic, photothermal, and photochemical solar energy conversion
Citation
VOL 65, 211-218
URI
http://pubs.kist.re.kr/handle/201004/16936
ISSN
0927-0248
Appears in Collections:
KIST Publication > Article
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