Dry etching of ZnO using an inductively coupled plasma

Title
Dry etching of ZnO using an inductively coupled plasma
Authors
이지면장기병김경국최원국박성주
Keywords
ZnO
Issue Date
2001-01
Publisher
Journal of the Electrochemical Society
Citation
VOL 148, NO 1, G1-G3
URI
http://pubs.kist.re.kr/handle/201004/16966
ISSN
0013-4651
Appears in Collections:
KIST Publication > Article
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