Synthesis of nanocrystalline diamond film by hot filament CVD method

Title
Synthesis of nanocrystalline diamond film by hot filament CVD method
Authors
강민식이욱성백영준채기웅임대순
Keywords
hot filament CVD; pressure; nanocrystalline diamond film; microcrystalline diamond film
Issue Date
2001-01
Publisher
한국세라믹학회지; Journal of the Korean Ceramic Society
Citation
VOL 38, NO 1, 34-38
URI
http://pubs.kist.re.kr/handle/201004/16971
ISSN
1229-7801
Appears in Collections:
KIST Publication > Article
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