Improvement of structural stability and IR detecting characteristics of microbolometer
- Improvement of structural stability and IR detecting characteristics of microbolometer
- 강호관; 하원호; 박철우; 김병규; 문성욱; 김도훈
- MEMS; microbolometer; themal isolution structure; SiNx; VOx; IR; surface micromachining; sacrificial layer; vanadium oxide; floating structure
- Issue Date
- Proceedings of SPIE-Micromachining and Microfabrication Process Technology VI
- VOL 4174, 346-353
- Appears in Collections:
- KIST Publication > Conference Paper
- Files in This Item:
There are no files associated with this item.
- RIS (EndNote)
- XLS (Excel)
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.