Improvement of structural stability and IR detecting characteristics of microbolometer

Title
Improvement of structural stability and IR detecting characteristics of microbolometer
Authors
강호관하원호박철우김병규문성욱김도훈
Keywords
MEMS; microbolometer; themal isolution structure; SiNx; VOx; IR; surface micromachining; sacrificial layer; vanadium oxide; floating structure
Issue Date
2000-09
Publisher
Proceedings of SPIE-Micromachining and Microfabrication Process Technology VI
Citation
VOL 4174, 346-353
URI
http://pubs.kist.re.kr/handle/201004/17007
ISSN
0277-786X
Appears in Collections:
KIST Publication > Conference Paper
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